Sealing Apparatus

专利摘要:
An apparatus for forming a seal with an object that is fed through a wall of a vacuum chamber, the apparatus comprising a sealing element configured to engage with the object, the sealing element being formed from a resilient material and an arrangement configured to apply a compressive force to the sealing element such that the apparatus forms the seal with the object.
公开号:NL2020590A
申请号:NL2020590
申请日:2018-03-15
公开日:2018-04-04
发明作者:Wilhelmus Damen Johannes；Bex Jan
申请人:Asml Netherlands Bv；
IPC主号:

专利说明:

Sealing Apparatus
FIELD
[0001] The present invention relates to an apparatus for forming a seal with an object that is fed through a wall, such as a wall of a vacuum chamber and associated apparatus, assemblies and methods.
BACKGROUND
[0002] A lithographic apparatus is a machine constructed to apply a desired pattern onto a substrate. A lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). A lithographic apparatus may for example project a pattern from a patterning device (e.g. a mask) onto a layer of radiation-sensitive material (resist) provided on a substrate.
[0003] The wavelength of radiation used by a lithographic apparatus to project a pattern onto a substrate determines the minimum size of features which can be formed on that substrate. A lithographic apparatus which uses EUV radiation, being electromagnetic radiation having a wavelength within the range 4-20 nm, may be used to form smaller features on a substrate than a conventional lithographic apparatus (which may for example use electromagnetic radiation with a wavelength of 193 nm).
[0004] EUV radiation is absorbed by most matter, including air and other known gasses. As such, for effective operation of the lithographic apparatus, one or more parts of the lithographic apparatus, such as for example an illumination system and/or projection system of the lithographic apparatus, may be operated in a vacuum environment or under low pressure environment. In other words, one or more parts of the lithographic apparatus may be arranged in one or more vacuum chambers.
[0005] One or more fibers or fiber hoses may be passed through a wall of the one or more vacuum chambers, for example to transmit radiation towards one or more components, such as for example one or more optical components, of the lithographic apparatus.
[0006] For example, a welded flange may be used to pass a fiber or fiber hose through the wall of the one or more vacuum chambers. This may include fixing the fiber or fiber hose to the flange and attaching the flange on the wall of the one or more vacuum chambers. When a plurality of fibers or fiber hoses is needed to be passed through the vacuum wall of the one or more vacuum chamber, each fiber or fiber hose may be fixed to a respective flange and the flange may be attached to the wall of the one or more vacuum chambers. This process may be time consuming, require a large amount of space on the wall of the one or more vacuum chambers and/or lead to a complex system for passing the fibers or fiber hoses through the wall of the one or more vacuum chambers. Additionally, the repair of individual fibers or fiber hoses may be difficult or even impossible.
SUMMARY
[0007] According to a first aspect of the invention there is provided an apparatus for forming a seal with an object that is fed through a wall, such as for example a wall of a vacuum chamber. The apparatus may comprise a sealing element configured to engage with the object. The sealing element may be formed from a resilient material. The apparatus may comprise an arrangement configured to apply a compressive force to the sealing element such that the apparatus forms the seal with the object. The apparatus, e.g. the arrangement, may allow the seal with the object to be formed after the object has been fed or passed through the wall (e.g. an opening thereof). This may facilitate installation of the object, e.g. in or on a lithographic apparatus. For example, the arrangement of the object relative to one or more components of the lithographic apparatus may be facilitated. By engaging the sealing element with the object, less space or volume may be required for fastening the apparatus to the wall.
[0008] The arrangement may be configured to apply the compressive force to the sealing element such that the seal is formed between the object and the wall, e.g. the wall of the vacuum chamber.
[0009] The compressive force may comprise a first component. The compressive force may comprise a second component. The arrangement may be configured to apply the first component of the compressive force to the sealing element in a first direction. The arrangement may be configured to apply the second component of the compressive force to the sealing element in a second direction.
[00010] The first direction may be different to the second direction. The first direction may be orthogonal (e.g. substantially orthogonal) to the second direction.
[00011] The sealing element may comprise a bore for receiving the object within the bore.
[00012] The sealing element may comprise an opening. The opening may comprise or define a split section. The split section may extend between the bore and an outer surface of the sealing element.
[00013] The sealing element may be configured to partially or completely enclose or surround the object.
[00014] The sealing element may comprise an elastomeric material, such as for example a fluoroelastomer and/or synthetic rubber.
[00015] The arrangement may comprise a lid portion. The lid portion may comprise a recess configured to house or receive the sealing element.
[00016] The recess may comprise or define a surface that is configured for engaging with a surface, such as for example a complementary surface, of the sealing element.
[00017] The surface of the recess may be configured or shaped to match or correspond (e.g. substantially match or correspond) to the surface, e.g. the complementary surface, of the sealing element such that at least a part of the compressive force applied by the arrangement may be transferred to and/or distributed across at least a part of the sealing element.
[00018] The arrangement may comprise a further sealing element. The further sealing element may be configured for arrangement between the lid portion and a further surface of a mounting member or the wall, e.g. the wall of the vacuum chamber.
[00019] The further sealing element may be configured for arrangement in a recess formed in the farther surface. For example, the further sealing element may be configured to fit into the recess formed in the further surface.
[00020] The further sealing element may comprise a planar (e.g. a substantially planar) protrusion.
[00021] At least one of: a shape, area, position and footprint of the planar protrusion may correspond (e.g. substantially correspond) to at least one of: a shape, area, position and footprint of a surface or portion, e.g. a planar or substantially planar surface or portion, of the sealing element.
[00022] The arrangement may comprise a fastening element or a plurality of fastening elements for detachably fastening the lid portion to the further surface.
[00023] For example, when the lid portion is fastened or attached to the further surface, the lid portion may be configured to apply the first component of the compressive force to the sealing element and/or to the further sealing element.
[00024] For example, when the lid portion is fastened or attached to the further surface, the lid portion may be configured to urge at least the surface or portion, e.g. the planar surface or portion, of the sealing element towards a respective planar protrusion of the further sealing element.
[00025] The arrangement may comprise a force applying member. The force applying member may be configured to be detachably fastened to the lid portion.
[00026] For example, when the force applying member is fastened or attached to the lid portion, the force applying member may be configured to apply the second component of the compressive force to the sealing element.
[00027] The arrangement may comprise a further fastening element or a plurality of further fastening elements for fastening the force applying member to the lid portion.
[00028] The arrangement may comprise a pair of compression elements. The sealing element may be located or locatable between the pair of compression elements.
[00029] At least one compression element or the compression elements of the pair of compression elements may be configured to balance and/or equalize the second component of the compressive force on or across the sealing element.
[00030] The apparatus may comprise the mounting member. The arrangement may be configured for detachably fastening or attaching the apparatus to the mounting member.
[00031] The mounting member may be configured for detachably fastening or attaching the apparatus to the wall, e.g. the wall of the vacuum chamber.
[00032] The apparatus may be configured for being detachably fastened or attached to the wall, e.g. the wall of the vacuum chamber.
[00033] The seal formed with the object and/or between the object and wall of the vacuum chamber may be or comprise a hermetic seal.
[00034] According to a second aspect of the invention there is provided a sealing assembly. The sealing assembly may comprise an apparatus according to the first aspect. The sealing assembly may comprise an object for feeding through a wall, e.g. a wall of a vacuum chamber.
[00035] The object may comprise at least one of: a fiber, a fiber hose, fiber bundle, pipe, tubing, cable or wire.
[00036] According to a third aspect of the invention there is provided a lithographic apparatus comprising one or more of the following: an illumination system configured to condition a radiation beam, a support structure constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto the substrate.
[00037] The support structure, illumination system, substrate table and/or projection system may be arranged in one or more vacuum chambers. The lithographic apparatus may comprise an apparatus for forming a seal with an object that is fed through a wall of the one or more vacuum chamber according to the first aspect.
[00038] According to a fourth aspect of the invention there is provided a method for forming a seal with an object that is fed through a wall, such as for example a wall of a vacuum chamber. The method may comprise engaging a sealing element with the object. The sealing element may be formed from a resilient material. The method may comprise applying a compressive force to the sealing element such that a seal is formed with the object.
[00039] The method may comprise feeding or passing the object through the wall, e.g. the wall of the vacuum chamber, prior to engaging the object with the sealing element.
[00040] The compressive force may comprise a first component. The compressive force may comprise a second component. The method may comprise applying the first component of the compressive force to the sealing element in a first direction.
[00041] The method may comprise applying the second component of the compressive force to the sealing element in a second direction.
[00042] The first direction may be different to the second direction. The first direction may be orthogonal (e.g. substantially orthogonal) to the second direction.
[00043] The first component of the compressive force may be applied to the sealing element prior to applying the second component of the compressive force to the sealing element.
[00044] Various aspects and features of the invention set out above or below may be combined with various other aspects and features of the invention as will be readily apparent to the skilled person.
BRIEF DESCRIPTION OF THE DRAWINGS
[00045] Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings, in which:
Figure 1 depicts a lithographic system comprising a lithographic apparatus and a radiation source according to an embodiment of the invention;
Figure 2 depicts an exploded view of an apparatus for forming a seal with an object that is fed through a wall of a vacuum chamber according to an embodiment of the present invention;
Figure 3 depicts an exploded view of a portion of the apparatus of Figure 2;
Figure 4 depicts a portion of a bottom side of a lid portion of the apparatus of Figure 2;
Figure 5 A depicts the apparatus of Figure 2 fastened or attached to a mounting member; Figure 5B depicts the apparatus of Figure 5 A from below or underneath;
Figure 6 depicts a sealing assembly according to an embodiment of the present invention; Figure 7 A depicts a sealing element for use with the apparatus of Figure 2;
Figure 7B depicts a front view of another sealing element for use with the apparatus of Figure 2;
Figure 7C depicts a front view of another sealing element for use with the apparatus of Figure 2; and
Figure 8 depicts a flow chart of a method for forming a seal with an object that is fed through a wall of a vacuum chamber according to an embodiment of the invention.
DETAILED DESCRIPTION
[00046] Figure 1 show's a lithographic system including an apparatus for forming a seal with an object that is fed through a wall of a vacuum chamber according to one embodiment of the invention.
[00047] The lithographic system comprises a radiation source SO and a lithographic apparatus LA. The radiation source SO is configured to generate an extreme ultraviolet (EUV) radiation beam B. The lithographic apparatus LA comprises an illumination system IL, a support structure MT configured to support a patterning device MA (e.g. a mask), a projection system PS and a substrate table WT configured to support a substrate W. The illumination system 1L is configured to condition the radiation beam B before it is incident upon the patterning device MA. The projection system is configured to project the radiation beam B (now patterned by the mask MA) onto the substrate W. The substrate W may include previously formed patterns. Where this is the case, the lithographic apparatus aligns the patterned radiation beam B with a pattern previously formed on the substrate W.
[00048] The radiation source SO, illumination system IL, and projection system PS may all be constructed and arranged such that they can be isolated from the external environment. A gas at a pressure below atmospheric pressure (e.g. hydrogen) may be provided in the radiation source SO. A vacuum may be provided in illumination system IL and/or the projection system PS. A small amount of gas (e.g. hydrogen) at a pressure well below atmospheric pressure may be provided in the illumination system IL and/or the projection system PS.
[00049] The radiation source SO shown in Figure 1 is of a type which may be referred to as a laser produced plasma (LPP) source). A laser 1, which may for example be a CO2 laser, is arranged to deposit energy via a laser beam 2 into a fuel, such as tin (Sn) which is provided from a fuel emitter 3. Although tin is referred to in the following description, any suitable fuel may be used. The fuel may for example be in liquid form, and may for example be a metal or alloy. The fuel emitter 3 may comprise a nozzle configured to direct tin, e.g. in the form of droplets, along a trajectory towtirds a plasma formation region 4. The laser beam 2 is incident upon the tin at the plasma formation region 4. The deposition of laser energy into the tin creates a plasma 7 at the plasma formation region 4. Radiation, including EUV radiation, is emitted from the plasma 7 during de-excitation and recombination of ions of the plasma.
[00050] The EUV radiation is collected and focused by a near normal incidence radiation collector 5 (sometimes referred to more generally as a normal incidence radiation collector). The collector 5 may have a multilayer structure which is arranged to reflect EUV radiation (e.g. EUV radiation having a desired wavelength such as 13.5 nm). The collector 5 may have an ellipsoidal configuration, having two ellipse focal points. A first focal point may be at the plasma formation region 4, and a second focal point may be at an intermediate focus 6, as discussed below.
[00051] The laser 1 may be remote from the radiation source SO. Where this is the case, the laser beam 2 may be passed from the laser 1 to the radiation source SO with the aid of a beam delivery system (not shown) comprising, for example, suitable directing mirrors and/or a beam expander, and/or other optics. The laser 1 and the radiation source SO may together be considered to be a radiation system.
[00052] Radiation that is reflected by the collector 5 forms a radiation beam B. The radiation beam B is focused at point 6 to form an image of the plasma formation region 4, which acts as a virtual radiation source for the illumination system IL. The point 6 at which the radiation beam B is focused may be referred to as the intermediate focus. The radiation source SO is arranged such that the intermediate focus 6 is located at or near to an opening 8 in an enclosing structure 9 of the radiation source.
[00053] The radiation beam B passes from the radiation source SO into the illumination system IL, which is configured to condition the radiation beam. The illumination system IL may include a facetted field mirror device 10 and a facetted pupil mirror device 11. The faceted field mirror device 10 and faceted pupil mirror device 11 together provide the radiation beam B with a desired cross-sectional shape and a desired angular intensity distribution. The radiation beam B passes from the illumination system IL and is incident upon the patterning device MA held by the support structure MT. The patterning device MA reflects and patterns the radiation beam B. The illumination system IL may include other mirrors or devices in addition to or instead of the faceted field mirror device 10 and faceted pupil mirror device 11.
[00054] Following reflection from the patterning device MA the patterned radiation beam B enters the projection system PS. The projection system comprises a plurality of mirrors which are configured to project the radiation beam B onto a substrate W held by the substrate table WT. The projection system PS may apply a reduction factor to the radiation beam, forming an image with features that are smaller than corresponding features on the patterning device MA. A reduction factor of 4 may for example be applied. Although the projection system PS has two mirrors in Figure 1, the projection system may include any number of mirrors (e.g. six mirrors).
[00055] The radiation source SO shown in Figure 1 may include components which are not illustrated. For example, a spectral filter may be provided in the radiation source. The spectral filter may be substantially transmissive for EUV radiation but substantially blocking for other wavelengths of radiation such as infrared radiation.
[00056] At least one of the projection system PS, the illumination system IL, the support structure MT and the substrate table WT may be arranged or provided in one or more vacuum chambers.
[00057] Figure 1 schematically depicts an apparatus 100 for forming a seal with an object (not depicted in Figure 1) that is fed through a wall of a vacuum chamber according to an embodiment of the present invention. The apparatus 100 may be suitable or provided for use in or with the lithographic apparatus LA. For example, the apparatus 100 may be suitable or provided for forming a seal with an object that is fed through a wall of a vacuum chamber of the lithographic apparatus LA. Figure 1 depicts the apparatus 100 as being fastened or attached to a wall 101a of the of the projection system PS, which is arranged in a vacuum chamber 101. It will be appreciated that the apparatus is not limited to being fastened or attached to the wall of the projection system. For example, in other embodiments the apparatus may be provided for fastening or attaching to other components of the lithographic apparatus, such as for example the illumination system, the support structure and/or the substrate table.
[00058] The term “feeding” may be considered as encompassing the term “passing”. The terms “feeding” and “passing” may be interchangeably used.
[00059] Figure 2 schematically depicts an exploded view of the apparatus 100 depicted in Figure 1. in other words, Figure 2 schematically depicts the apparatus 100 in a disassembled state or configuration. Figure 3 schematically depicts an exploded view of a portion of the apparatus depicted in Figure 2.
[00060] The term “vacuum” may be considered as encompassing an absolute vacuum (0 Pascal) or a partial vacuum. In the context of the apparatuses, assemblies, and methods described herein, the term “vacuum chamber” may be considered as encompassing a pressure chamber and/or an enclosure including a low pressure environment relative to a pressure of an environment outside the enclosure.
[00061] Referring to Figure 2 and 3, the apparatus 100 comprises a sealing element 105. The sealing element 105 is configured to engage with an object that is fed or passed through the wall of the vacuum chamber (not depicted in Figures 2 and 3). The sealing element 105 is formed from a resilient material. The apparatus 100 comprises an arrangement 102 configured to apply a force, such as a compressive force, to the sealing element 105 such that the apparatus 100 forms a seal, e g. an hermetic seal, with the object. The apparatus 100, e.g. the arrangement, may allow the seal with the object to be formed after the object has been fed or passed through the wall 101a (e.g. an opening thereof) of the vacuum chamber 101. This may facilitate installation of the object in or on the lithographic apparatus. For example the arrangement of the object relative to one or more components of the lithographic apparatus may be facilitated. By engaging the sealing element with the object, less space or volume may be required for fastening the apparatus to the wall of the vacuum chamber.
[00062] The arrangement 102 may be configured to apply the compressive force lo the sealing element 105 such that the apparatus 100 forms a/the seal between the object and the wall 101a of the vacuum chamber 101, as will be described below.
[00063] The compressive force may comprise a first component and a second component. The arrangement 102 may be configured to apply the first component of the compressive force to the sealing element 105 in a first direction, which is indicated in Figure 2 by arrow CF1. The first component of the compressive force may cause compression and/or deformation of the sealing element 105 in the first direction CF1.
[00064] The arrangement 102 may be configured to apply the second component of the compressive force to the sealing element 105 in a second direction, which is indicated in Figure 2 by arrow CF2. The second component of the compressive force may cause compression and/or deformation of the sealing element 105 in the second direction CF2. The first and second directions CFl, CF2 may be different. For example, the first direction CF1 may be orthogonal or perpendicular (e.g. substantially orthogonal or perpendicular) to the second direction CF2, or vice versa. By compressing or deforming the sealing element in the first and second directions, which are perpendicular or orthogonal relative to each other, dual compression of the sealing element may be achieved. This dual compression may allow for a seal, e.g. an improved seal, to be formed with the object and/or between the object and the wall of the vacuum chamber.
[00065] in the embodiment depicted in Figures 2 and 3, the apparatus 100 comprises a plurality of sealing elements 105 (three of which are depicted in Figures 2 and 3). it will be appreciated that in other embodiments, the apparatus may comprise more than or less than three sealing elements, such as, for example, one, six or twelve sealing element(s).
[00066] Each sealing element 105 may be formed from an elastomeric material, such as for example a fluoroelastomer, a rubber, e.g. a synthetic rubber. For example, at least one or each sealing elements 105 may be formed from Viton ®. It will be appreciated that in other embodiments, each or at least one sealing element 105 may comprise, be made from, or be moulded from, another elastomeric material, for example another rubber and/or fluoroelastomer, such as for example Tecnoflon ® or the like. Each sealing element 105 may comprise a material that is generally deformable and/or compressible and/or chemically inert and/or heat resistant to temperatures that may, for example, be present in the vacuum chamber, e.g. during operation of the lithographic apparatus LA. Each sealing element 105 may be provided in the form of a Viton ® bush.
[00067] Each sealing element 105 comprises a bore 230 for receiving the object (not depicted in Figures 2 and 3). A shape or cross-section of the bore 230 may correspond (e.g. substantially correspond) to a shape or cross-section of the object received therein. This may allow for an improved seal to be formed with the object. In this embodiment, the bore 230 comprises a circular (e.g. substantially circular) cross-section, e.g. for receiving an object comprising a circular (e.g. substantially circular) cross-section. It should be understood that the sealing element disclosed herein is not limited to comprising a bore with a circular cross-section and that in other embodiments, the bore of the/each sealing element may comprise an elliptical, oval, squared or rectangular cross-section or the like.
[00068] Each sealing element 105 may be configured to partially or fully enclose or surround the object. In the embodiment depicted in Figure 2 and 3, each sealing element 105 is configured to fully enclose the object. It will be appreciated that in other embodiments, each sealing element may only partially enclose or surround the object.
[00069] The apparatus 100 comprises a lid portion 110. The lid portion 110 may comprise or be formed of a metal material, such as for example stainless steel. The lid portion 110 may be part or comprised in the arrangement 102. The lid portion 110 may comprises at least one recess 120 configured to house or receive at least one sealing element 105. In the embodiment depicted in Figure 2 and 3, the lid portion 110 comprises a plurality of recesses 120 (six of which are depicted in Figure 2). A first side or portion 115a of the lid portion 110 comprises three recesses 120 and a second side or portion 115b, which is arranged opposite the first side or portion 115a comprises another three recesses 120. It will be appreciated that the lid portion disclosed herein is not limited to comprising six recesses. For example, in other embodiments, the lid portion may comprise more than or less than six recesses. In addition or alternatively, the recesses may be arranged on each portion or side of the lid portion or on adjacent sides or portions of the lid portion.
[00070] Each recess 120 of the lid portion 110 comprises or defines a surface 120a that is configured for engaging with a surface 105a, e.g. a complementary surface, of each sealing element 105. The surface 120a of each recess 120 may be shaped to match or correspond, e.g. substantially match or correspond, to the complementary surface 105a of each sealing element 105 such that at least a part of the compressive force applied by the arrangement 102 is transferred and/or distributed, e.g. evenly distributed, across at least a part of the sealing element 105, e.g. the complementary surface 105a of the sealing element. This may allow for an improved seal being formed with the object. In the embodiment depicted in Figure 2 and 3, the surface 120a of each recess 120 and/or the complementary surface 105a of each sealing element 105 is provided in the form of a curved surface. It should be understood that the sealing element disclosed herein is not limited to comprising a curved surface. For example, in other embodiments, the surface of each recess and/or the complementary surface of each sealing element may comprise one or more flat surfaces or the like.
[00071] In the exemplary embodiment depicted in Figure 2 and 3, each sealing element 105 and/or each recess 120 comprises a D-shaped, or substantially D-shaped, cross-section. However, it should be understood that the sealing element(s) and/or recess(es) disclosed herein are not limited to such a cross-section. For example, in other embodiments, the cross-section of at least one or each recess and/or sealing element may be of a different shape, such as for example btdb shaped, circular or partially circular, elliptical or partially elliptical or parabolic, or the like.
[00072] The apparatus 100 comprises a further sealing element 140. The further sealing element 140 may be pail of or comprised in the arrangement 102. The further sealing element 140 is configured for arrangement between the lid portion 110, such as for example a surface or bottom surface 115c of the lid portion 110, and a further surface 150 of a mounting member 152, which will be described below. It will be appreciated that in other embodiments, the further sealing element is configured for arrangement between the lid portion and the wall, e.g. a portion thereof, of the vacuum chamber.
[00073] The further surface 150 comprises a recess 155. The further sealing element 140 may be configured for arrangement in the recess 155. For example, the further sealing element 140 is configured to fit into the recess 155. In other words, the recess 155 may be shaped such that the further sealing element 140 is receivable in the recess 155, for example, when the lid portion 110 is fastened or attached to the further surface 150.
[00074] The further sealing element 140 may comprise a planar (or substantially planar) protrusion 145. In the embodiment depicted in Figures 2 and 3, the further sealing element 140 comprises six planar protrusions 145. At least one of a shape, area, position and footprint of each planar protrusion 145 corresponds to at least one of a shape, area, position and footprint of another surface or portion 105b, such as planar (e.g. substantially planar) surface or portion, of each sealing element 105. The apparatus 100 is configured to position each sealing element 105 on a respective planar protrusion of the further sealing element 140, e.g. when the lid portion 110 is fastened or attached to the further surface 150. This may allow a further seal to be formed between the apparatus and the further surface 150.
[00075] As described above, the recess 155 may be shaped such that the further sealing element 140 is receivable in the recess 155, for example, when the lid portion 110 is attached or fastened to the further surface 150. In the embodiment depicted in Figure 2, the recess 155 comprises a plurality of recessed portions 160 (six of which are depicted in Figures 2 and 3). The recessed portions 160 are shaped to match or correspond (e.g. substantially match or correspond) to a shape of the planar protrusions 145 of the further sealing element 140. This may allow an improved further seal to be formed between the apparatus and the further surface.
[00076] The further sealing element 140 may be provided in the form of a gasket or a bush. The further sealing element 140 is formed from a resilient material. For example, the further sealing element 140 may be formed from an elastomeric material, e.g. a fluoroelastomer or rubber, such as for example Viton ®. It will be appreciated that in other embodiments, the further sealing element may comprise, be made from, or be moulded from, another elastomeric material, such as another rubber or fluoroelastomer such as for example Tecnoflon ®, or the like. The further sealing element may comprise a material that is generally compressible and/or chemically inert and/or heat resistant to temperatures that may , for example, be present in the vacuum chamber, e.g. during operation of the lithographic apparatus LA.
[00077] The apparatus 100 may comprise at least one or a plurality of fastening elements 130 for fastening or attaching the lid portion 110 to the further surface 150, such as for example over an opening 165 in the further surface 150. The plurality of fastening elements 130 may be provided in the form of a plurality of bolts, screws or the like. The plurality of fastening elements 130 may allow the lid portion 110 to be detachably fastened or attached to the further surface 150. This may allow the seal with the object and/or between the object and the wall of the vacuum chamber to be released or split. This in turn may facilitate repair, removal, replacement and/or maintenance of the object, [00078] The lid portion 110 comprises a plurality of through holes 125, four of which are schematically depicted in Figures 2 and 3. Each through-hole 125 is configured to receive a respective fastening element 130. The further surface 150 comprises a plurality of holes 170 (four of which are depicted in Figures 2 and 3) configured to receive the fastening elements 130. The fastening elements 130 allow the lid portion 110 to be detachably fastened or attached to the further surface 150, e.g. over the opening 165 in the further surface 150.
[00079] When the lid portion 110 is fastening or attached to the further surface 150, the lid portion 110 is configured to apply the first component of the compressive force to each sealing element 105 and/or to the further sealing element 140. In other words, when the fastening elements 130 are tightened, for example by applying a torque to the fastening elements 130, the lid portion 110 is urged or moved towards the further surface 150.
[00080] By tightening the fastening elements 130, the lid portion 110 applies the first component of compressive force in the first direction CF1 to the further sealing element 140. The first direction CF1 may be considered as a direction that is orthogonal or perpendicular (e.g. substantially orthogonal or perpendicular) to an upper surface 110a of lid portion 110. Additionally or alternatively, the first direction CF1 may be considered as a direction that is parallel (e.g. substantially parallel) to at least one or all fastening elements 130, e.g. a central or longitudinal axis thereof. By tightening the fastening elements 130, the lid portion 110 also applies the first component of the compressive force in first direction CF1 to each sealing element 105. In other words, w'hen the lid portion 110 is fastened or attached to the further surface 150, the lid portion 110 is configured to urge at least the planar surface or portion 105b of each sealing element 105 towards a respective planar' protrusion 145 of the further sealing element 140. This may allow a seal to be formed between each sealing element 105 and/or the further sealing element 140. When the lid portion 110 is fastened or attached to the further surface 150, the surface 120a of each recess 120 may be configured to act upon, e.g. apply the first component of the compressive force to a portion or all of the complementary surface 105a of each sealing element 105.
[00081] Referring to Figure 2, a thickness of the further sealing element 140 may be selected to be greater than a depth of the recess 155. The thickness of the further sealing element 140 may be selected such that, when the lid portion 110 is fastened or attached to the further surface 150, the further sealing element 140 is compressed by a desired or pre-determined amount. For example, a thickness of the compressed further sealing element 140 may correspond to a desired or predetermined proportion or amount of a thickness of the further sealing element 140 in an uncompressed state. A torque for fastening or attaching the lid portion 110 to the further surface may be selected based on one or more properties of the further sealing element 140. The one or more properties of the further sealing element 140 may comprise the thickness, dimensions and/or material of the further sealing element 140. The torque for fastening or attaching the lid portion 110 may be selected such that the bottom surface 115c of the lid portion 110 engages or contacts the further surface 150, e.g. when the lid portion 110 is fastened or attached to the further surface 150. This may result in an exemplify compression of the further sealing element 140 of about 20%. In other words, when the lid portion 110 is fastened or attached to the further surface 150, a thickness of the further sealing element may be about 80% of a thickness of the further sealing element 140 in the uncompressed state.
[00082] The apparatus 100 comprises a force applying member 175a configured to be detachably fastened to the lid portion 110. For example, the force applying member 175a may be part of or comprised in the arrangement 102. In the embodiment depicted in Figure 2, the arrangement comprises two force applying members 175a, 175b. In Figure 2, a first force applying member 175a is depicted for attachment to the first side or portion 115a of the lid portion 110. A second force applying member is depicted in Figure 2 as being attached to the second side or portion 115b of the lid portion 110. In the following description, the features of the first force applying member will be described in more detail. However, it will be appreciated that any of the features described in relation to the first force applying member may also apply to the second force applying member.
[00083] The first force applying member 175a may be configured to apply the second component of compressive force to the sealing elements 105, e.g. when the first force applying member 175a is fastened to the lid portion 110, as will be described below.
[00084] The apparatus 100 may comprise at least one compression element 180a. The compression element 180 may be part or comprised in the arrangement 102. In the embodiment depicted in Figures 2 and 3, the arrangement 102 comprises pairs of compression elements 180a, 180b. Each sealing element 105 can be located or arranged between a respective pair of compression elements 180a, 180b. The compression elements of the pairs of compression elements 180a, 180b are configured to balance and/or equalize the second component of the compressive force on or across each sealing element 105. Although Figures 2 and 3 depict three pairs 180a, 180b of compression elements, it will be appreciated that in other embodiments more or less than three pairs of compression elements may be provided.
[00085] The apparatus 100 comprises a plurality of further fastening elements 185 (four of which are depicted in Figure 2) for fastening or attaching the first and/or second force applying members 175a, 175b to the lid portion 110. The further fastening elements 185 may be provided in the form of bolts, screws or the like. The further fastening elements 185 may allow the first force applying member 175a to be detachably fastened or attached to the lid portion 110. This may allow the seal with the object and/or between the object and the wall of the vacuum chamber to be released or split. This in turn may facilitate repair, removal, replacement and/or maintenance of the object.
[00086] The first force applying member 175a comprises a plurality of through-holes 190 (four of which are depicted in Figure 3). Tire lid portion 110 comprises a plurality of holes 200 (four of which are depicted in Figure 3) for receiving the plurality of further fastening element 185 to allow for detachably fastening of the first force applying member 175a and/or the pairs of compression plates 180a, 180b to the lid portion 110. The plurality of through-holes 190 of the first and/or second force applying member 175a, 175b may be threaded holes. The plurality of holes 200 in the lid portion 110 may be threaded holes.
[00087] Referring to Figure 3, the lid portion 110 comprises a recessed area 205. The recessed area 205 may comprise a shape and/or size, which corresponds (e.g. substantially corresponds) to a shape and size of a portion of the first force applying member 175a. This may allow at least the portion of the first force applying members 175a to be arranged in the recessed area 205.
[00088] The first force applying member 175a comprises a plurality of recesses 210, three of which are depicted in Figures 2 and 3. hi the exemplary embodiment shown, each recess of the plurality of recesses 210 comprises equal dimensions. One would appreciate that in other embodiments the recesses or each recess may vary in shape and/or size.
[00089] Each compression element of the pairs of compression elements 180a, 180b comprises a recess 220, such as for example a curved recess. The/each recess 220 may be arranged to cooperate with a respective recess 210 of the first force applying member 175a. For example, the recess 220 of each compression element of the pairs of compression elements 180a, 180b may be arranged relative to a respective recess 210 of the first force applying member 175a so that a through-passage, through which an object may extend in use, is formed. The/each recess 210 of the first force applying member 175a and the recess 220 of each compression plate of the pairs of compression plates 180a, 180b may be arranged to extend or open into opposite directions of each other. The/each recess 210 of the first force applying member 175a and/or the recess 220 of each compression plate of the pairs of compression plates 180a, 180b may comprise a U-shape (or substantial U-shape) or a horse-shoe shape.
[00090] Figure 4 schematically depicts a portion of a bottom side of the lid portion 110. The apparatus 100 may comprise a plurality of first engagement portions 182a. For example, in the embodiment depicted in Figure 4, the apparatus 100 comprises three first engagement portions 182a. However, it will be appreciated that in other embodiments, the apparatus may comprise more or less than three first engagement portions.
[00091] At least one or each first engagement portion 182a may be provided for engaging with at least a portion of each sealing element 105. The plurality of first engagement portion 182 may be part of or comprised in the arrangement 102. Each first engagement portion 182 may be arranged in the lid portion 110. For example, each first engagement portion 182a may be arranged in at least one or each recess of the plurality of recesses 120 of the lid portion 110. Each first engagement portion 182a may be arranged in the lid portion 110, e.g. the/each recess 120 of the lid portion 110, to cooperate with at least one compression element 180b of the pair of compression element 180a, 180b. At least one or each first engagement portion 182a and the at least one compression element 180b of the pairs of compression elements 180a, 180b may be configured to provide or define a first engagement surface 183a for a respective sealing element 105. The first engagement surface 183a may be or comprise a flat or planar (e.g. substantially flat or planar) surface 183a.
[00092] At least one or each first engagement portion 182a may be shaped or arranged such as to complement a shape of the at least one compression element 180b of the pairs of compression element 180a, 180b, e.g. to allow the formation of the first engagement surface 183a. At least one or each first engagement portion 182a and the at least one compression element 180b of the pairs of compression elements 180a, 180b may comprise a shape and/or size that corresponds to and/or complements (e.g. substantially corresponds and/or complements) a shape or size of a respective sealing element 105.
[00093] At least one or each first engagement portion 182a may comprise a recess 184a. The recess 184a of the at least one or each first engagement portion 182a may be arranged to cooperate with the recess 220 of the at least one compression element 180b of the pairs of compression elements 180a, 180b. For example, the recess 184a of the first engagement portion 182a may be arranged to form a passage or through-passage with the recess 220 of the at least one compression element 180b of the pairs of compression elements 180a, 180b. In use, an object (not depicted In Figure 4) may be arranged to extend through the passage or through-passage.
[00094] In the embodiment depicted in Figure 4, each first engagement portion 182a is provided in the form of a stepped portion in a respective recess 120 of the lid portion 110.
[00095] The apparatus 100 may comprise a plurality of second engagement portions 182a [00096] For example, in the embodiment depicted in Figure 4, the apparatus 100 comprises three second engagement portions 182b. However, it will be appreciated that in other embodiments, the apparatus may comprise more or less than three second engagement portions.
[00097] At least one or each second engagement portion 182b may be provided for engaging with at least another portion of each sealing element 105. The plurality of second engagement portions 182b may be part of or comprised in the airangement 102. The plurality of second engagement portions 182b may be part of or comprised in the first force applying member 175a.
[00098] At least one or each second engagement portion 182b may be arranged on the first force applying member 175a so as to extend or protrude from the first force applying member 175a. For example, when the first force applying member 175a is mounted or fastened to the lid portion 110, the at least one or each second engagement portion 182b may be arranged on the first force applying member 175a such that the at least one or second engagement portion 182b extends or protrudes into the/each recess 120 of the lid portion 110.
[00099] The at least one or each second engagement portion 182b may be arranged on the first force applying member 175a to cooperate with at least one other compression element 180a of the pairs of compression elements 180a, 180b. The at least one or each second engagement portion 182b and the other compression element 180a of the pairs of compression elements 180a, 180b may be configured to provide a second engagement surface 183b for the sealing element 105. The second engagement surface 183b may be or comprise a flat or planar (e.g. substantially flat or planar) surface 183b. The at least one or each second engagement portion 182a may be shaped or arranged such as to complement a shape of the at least one other compression element 180a of the pairs of compression elements 180a, 180b, e.g. to allow the formation of the second engagement surface 183b. The at least one or each second engagement portion 182b and the at least one other compression element 180a of the pairs of compression elements 180a, 180b may comprise a shape and/or size that corresponds and/or complements (e.g. substantially corresponds and/or complements) a shape or size of the sealing element 105.
[000100] The at least one or each second engagement portion 182b may comprise a recess 184b. The recess 184b of the at least one or each second engagement portion 182b may be arranged to cooperate with the recess 220 of the at least one other compression element 180a of the pairs of compression elements 180a, 180b. For example, the recess 184b of the at least one or each second engagement portion 182b may be arranged to form a passage or through-passage with the recess 220 of the at least one other compression element 180a of the pairs of compression elements 180a, 180b. In use, an object (not depicted in Figure 4) may be arranged to extend through the passage or through-passage. The recess 184b of the at least one or each second engagement portion 182b may be defined by or part of at least one or each recess 210 of the first force applying member 175a.
[000101] In the embodiment depicted in Figure 4, the at least one or each second engagement portion 182b is provided in the form of a stepped portion.
[000102] The first and second engagement portions 182a, 182b may be arranged such that the first and second engagement portions 182a, 182b are opposite relative to each other, e.g. when the first force applying member 175a is mounted or fastened to the lid portion 110. For example, the first engagement portion 182a may be arranged on a first side 120b of the/each recess 120 of the lid portion 110. When the first force applying member 175a is fastened or mounted to the lid portion 110, the second engagement portion may be arranged on a second side 120c of the/each recess 120. In this embodiment, the first side 120b of the/each recess 120 is opposite to the second side 120c of the/each recess 120. Each sealing element 105 may be arranged or arrangeable between the first and second engagement portions 182a, 182b and/or a pair of compression elements 180a, 180b.
[000103] For example, when the first force applying member 175a is mounted or fastened to the lid portion 110, at least one or each of the pairs of compression elements 180a, 180b are arranged in the/each recess 120 of the lid portion 110 and/or each sealing element 105 is arranged in a respective recess 120 of the lid portion 110, at least one or each pair of compression elements 180a, 180b and/or the first and second engagement portions 182a, 182b may allow for equalizing or balancing of the second component CF2 of the compressive force across the/each sealing element 105.
[000104] The/each recess 120 of the lid portion 110 may comprise a first opening 120d. The first opening 120d may be arranged on the first side 120b of the/each recess 120. The/each recess 120 may comprise a second opening 120e. Tire second opening 120e may be arranged on the second side 120c of each recess 120. In use, the object may be passed or fed through the first and second opening 120c, 120e of at least one or each recess 120. The at least one or each pair of compression elements 180a, 180b and the first and second engagement portions 182a, 182b may be arranged to keep or retain each sealing element 105 in each recess 120 of the lid portion 110, e.g. when the second component of the compressive force is applied to each sealing element 105. In other words, the at least one or each pair of compression elements 180a, 180b and the first and second engagement portions 182a, 182b, which may be provided in the form of stepped portions, as described above, may be arranged to prevent or reduce a portion of the sealing element 105 from being pushed through one or both of the first and second openings 120d, 120e of the/each recess 120 of the lid portion 110. For example, the at least one or each pair of compression elements 180a, 180b and the first and second engagement portions 182a, 182b may be arranged to occlude a portion of one or both of the first and second openings 120d, 120e. When the first force applying member 175a is fastened or attached to the lid portion, the first force applying member 175a is configured to apply the second component of compressive force to each sealing element 105. In other words, when the further fastening elements 185 are tightened, for example by applying a torque to the further fastening elements 185, the first force applying member 175a is urged or moved towards the sealing elements 105. Tire movement of the first force applying member 175a towards the sealing elements 105 moves the compression elements of the pairs of the compression elements 180a, 180b and/or the first and second engagement portions 182a, 182b together, thereby equalizing or balancing the second component of the compressive force across each sealing element 105. By tightening the further fastening elements 185, the second component compressive force is applied to the compression elements of the pairs of compression element 180a, 180b, the first and second engagement portions 182a, 182b and/or the sealing element 105 in the second direction. The second direction CF2 may be considered as a direction that is parallel (e.g. substantially parallel) to the upper surface 110a of lid portion 110. The second direction CF2 may be considered as a direction that is parallel (e.g. substantially parallel) to at least one or all of the further fastening elements 185 e.g. a longitudinal or central axis thereof. Additionally or alternatively, the second direction CF2 may be considered as a direction that extends along or is parallel (e.g. substantially parallel) to a central or longitudinal axis of at least one object that may be engaged with at least one sealing element 105, e.g. in use of the apparatus 100. As described above, the second direction CF2 may be considered to be orthogonal or perpendicular (e.g. substantially orthogonal or perpendicular) to the first direction CF1. This may allow the first component of the compressive force to be applied in a direction that is perpendicular or orthogonal (e.g. substantially perpendicular or orthogonal) to the second component of the compressive force. In other words, a dual compression may be applied to each sealing element 105. This may allow for a seal, e.g. an improved seal, to be formed with the object and/or between the object and the wall of the vacuum chamber.
[000105] The apparatus 100 may comprise the mounting member 152. The further surface 150 may be part of or comprised in the mounting member 152. The mounting member may be provided in the form of a flange, such as for example an ISO standard compliant flange. The apparatus 100, e.g. the arrangement 102, may be configured for detachably fastening or attaching to the mounting member 152. The mounting member 152 may be provided by the vacuum chamber, e.g. a portion thereof. Alternatively, the vacuum chamber, e.g. a portion thereof, may comprise a complementary portion, which may be configured to allow for fastening or attaching of the mounting member to the vacuum chamber.
[000106] It will be appreciated that in other embodiments, the further surface 150 may be part of or comprised in the wall of the vacuum chamber, e.g. a portion thereof. In such embodiments, the recess 155 may be formed on the wall of the vacuum chamber (e.g. a portion thereof).
[000107] Figure 5A schematically depicts the apparatus 100 fastened or attached to the mounting member 152. Figure 5B schematically depicts the apparatus 100 depicted in Figure 5 A from below or underneath. In other words, Figure 4B schematically depicts the apparatus 100 as viewed from an interior of the vacuum chamber. The lid portion 110 is fastened or attached to the further surface 150 by the fasting element 130, thereby compressing the sealing elements 105 in the first direction CF1 and/or against the further sealing element 140. The first force applying member 175a is fastened or attached to the lid portion 110, thereby compressing the sealing elements in the second direction CF2. Figures 5A and 5B depict the apparatus 100 as being arranged to cover the opening 165 of the mounting member 152. It will be appreciated that in other embodiments, the apparatus may be arranged to cover an opening in a wall of a vacuum chamber.
[000108] Figure 6 schematically depicts a sealing assembly 300 according to an embodiment of the present invention. The assembly 300 comprises an apparatus 305 for forming a seal with an object 310 that is fed or passed through a wall (e.g. an opening thereof) of a vacuum chamber (not depicted in Figure 6). The apparatus 305 depicted in Figure 5 may comprise any of the features of the apparatus 100 described above in relation any one of Figures 1 to 5B. The assembly 300 may comprise at least one object 310. In the embodiment depicted in Figure 6, the assembly 300 comprises a plurality of objects 310 (six of which iire depicted in Figure 6). One or more objects of the plurality of objects 310 may be provided in the form of an elongate object. One or more objects of the plurality of objects 310 may comprise a circular cross-section (e.g. substantially circular cross-section). One or more objects of the plurality of objects may be flexible or comprise a joint or the like.
[000109] One or more objects of the plurality of objects 310 may be provided in the form of at least one of: a fiber, such as for example an optical fiber, a fiber hose, fiber bundle, pipe, tubing, cable, wire or the like. One or more objects of the plurality of objects 310 may be configured for transmitting radiation and/or a signal, such as for example a measuring signal, from and/or to one or more components of the lithographic apparatus LA. The signal may comprise at least one of: an electrical signal, an optical signal or a power signal. For example, one or more objects of the plurality of objects 310 may be part or comprised in an interferometer system, a stage positioning module (or stage control system) and/or a mirror pre-heating system of the lithographic apparatus LA. it will be appreciated that the objects disclosed herein are not limited to being part of or comprised an interferometer system, a stage position module (or stage control system) and/or a mirror pre-heating system of the lithographic apparatus. For example, in other embodiments one or more objects of the plurality of objects may be configured to transmit or transport power, electricity or a fluid from and/or to one or more components of the lithographic apparatus. The fluid may be or comprise a cooling fluid, a purging fluid and/or a cleaning fluid. The fluid may be or comprise a gas, a liquid or a combination thereof.
[000110] In the embodiment depicted in Figure 6, the apparatus 305 is configured to form a seal with the plurality of objects 310, as described above. The apparatus 305 may additionally or alternatively be configured to form a seal between the plurality of objects 310 and the further surface 150. The plurality of objects 310 may be bent or, curved such that the one or more objects of the plurality of objects 310 enter the apparatus 305 in a first direction, and may be directed into or towards the vacuum chamber (not depicted in Figure 6) in a different direction. For example, in the exemplary embodiment of Figure 6, the plurality of objects 310 are directed into or towards the vacuum chamber in a second direction that is orthogonal or perpendicular (e.g. substantially orthogonal or perpendicular) to the first direction. The first direction in which the plurality of objects 310 enter the apparats 305 may be considered as being in line with or parallel to (e.g. substantially parallel to) the second component of the compressive force, e.g. the second direction CF2.
[000111] Figure 7 A schematically depicts a sealing element 105 for use with an apparatus 100 for forming a seal with an object that is fed through a wall of a vacuum chamber. For illustrative purposes, the sealing element is shown with a portion of an object 310 partially installed or inserted in the sealing element 105. The sealing element 105 depicted in Figure 7A is similar to that depicted in Figures 2 and 3. The sealing element 105 depicted in Figure 7A may comprise any of the features of the sealing element(s) described above in relation to Figure 2 and 3. The sealing element 105 depicted in Figure 7A comprises an opening 105c. The opening 105c may be configured to allow the sealing element 105 to engage with the object 310. In other words, the opening 105c may be configured to allow for arrangement of the sealing element 105 on the object 310. By providing the sealing element 105 with an opening, the arrangement of the sealing element 105 on the object 310 may be facilitated. This may allow a seal with the object to be formed after the object has been fed or passed through the wall (e.g. an opening thereof) of the vacuum chamber. This may facilitate installation of the object in or on the lithographic apparatus. For example the arrangement of the object relative to one or more components of the lithographic apparatus may be facilitated.
[000112] The opening 105c defines or comprises a split section, which extends between the bore 230 and an outer surface 105d of the sealing element 105. The split section 105d may allow the sealing element 105 to be opened, thereby allowing the sealing element 105 to be arranged on the object 300, such that the object 310 can be located or arranged in the bore 230. The sealing element 105 may be provided in the form of a split bushing, a split grommet, or the like, it will be appreciated that the sealing element(s) disclosed herein is not limited to comprising an opening. For example, in other embodiments, the sealing element may be provided without an opening. In such embodiments an object may, for example, be threaded, passed or fed through the bore of the sealing element.
[000113] Figures 7B and 7C each schematically depict a front view' of another exemplary sealing element 105 for use with an apparatus 100 for forming a seal with an object that is fed through a wall of a vacuum chamber. The sealing elements 105 depicted in Figures 7B and 7C are similar to the sealing element depicted in Figure 7A. The sealing elements depicted in Figures 7B and 7C may comprise any of the features of the sealing element depicted in Figure 7A. In the embodiments depicted in Figures 7B and 7C, the sealing element 105 may be configured to engage a plurality of objects (not depicted in Figures 7B and 7C). This may allow and/or facilitate the formation of a seal with a plurality of objects. For example, the sealing element 105 may comprise a plurality of bores 230.
[000114] In the embodiment depicted in Figure 7B, the sealing element 105 is configured to engage with tw'o objects. The sealing element 105 comprises two bores 230. The two bores 230 are arranged along the opening 105c of the sealing element 105. The two bores 230 may considered as consecutively or successively arranged relative to each other, in other words, one of the two bores 230 may be airanged after or following the other of the two bores 230. It will be appreciated that the sealing element disclosed herein is not limited to being configured to engage with two objects. For example, in other embodiments, the sealing element may be configured to engage with more or less than two objects. In addition, it should be understood that the sealing element is not limited to comprising two or more bores that are arranged along the opening of the sealing element.
[000115] For example, as depicted in Figure 7C, the sealing element 105 may be configured to engage with four objects. The sealing element 105 may comprise a plurality of openings 105c (four of which are depicted in Figure 7C). Each opening 105c may be associated with a respective bore 230. Each opening 105c may extend between a respective bore 230 and the outer surface 105d of the sealing element 105. In the embodiment depicted in Figure 1C, the bores 230 and/or openings 105c may be considered as being radially arranged. It will be appreciated that the sealing element disclosed herein is not limited to comprising a radial arrangement of the opening(s) and/or bore(s).
[000116] Figure 8 depicts a flow chart of a method for forming a seal with an object that is fed through a wall (e.g. an opening thereof) of a vacuum chamber according to an embodiment of the invention. The method comprises engaging a sealing element 105 with the object 310 (step 410). As described above, for example in relation to Figures 2, 3 and 4, the sealing element 105 is formed from a resilient material. The method comprises applying a compressive force to the sealing element 105 such that a seal is formed with the object 310 (step 420).
[000117] The method may comprise feeding or passing the object 310 through the wall 101a of the vacuum chamber 101 prior to engaging the object 310 with the sealing element 105. This may facilitate the formation of a seal with the object 310. This may also facilitate installation of the object in or on the lithographic apparatus. For example the arrangement of the object relative to one or more components of the lithographic apparatus may be facilitated.
[000118] The method may comprise applying a first component of the compressive force to the sealing element in a first direction. For example, the compressive force may be applied by fastening or attaching the lid portion 110 of the apparatus 100 to the further surface 150.
[000119] Prior to fastening or attaching the lid portion 110 to the further surface 150, the sealing element 105 may be located or arranged in the lid portion 110 (e.g. a recess 120 thereof) and the force applying member 175a may be loosely attached or fastened to the lid portion 110, for example using a further fastening element 185. Once the force applying member 175a has been loosely attached or fastened to the lid portion 110, a pair of compression elements 180a, 180b may be arranged in the lid portion 110 such that the sealing element 105 is located or arranged between the pair of compression elements 180a, 180b and/or the first and second engagement portions 182a, 182b.
[000120] Prior to fastening or attaching the lid portion 110 to the further surface 150, the further sealing element 140 may be located or arranged between lid portion 110 and the further surface 150. Once the further sealing element 140 has been arranged or located, the lid portion 110 may be loosely fastened or attached to the further surface 150.
[000121] The first component of the compressive force may be applied to the sealing element by fully fastening or attaching the lid portion 110 to the further surface 150, e.g. by applying a torque to the fastening elements 130.
[000122] The method may comprise applying a second component of the compressive force to the sealing element 105 in a second direction. The first direction may be different to the second direction. For example, the first direction may be orthogonal or perpendicular (e.g. substantially orthogonal or perpendicular) to the second direction, or vice versa.
[000123] The second component of the compressive force may be applied to the sealing element by fully fastening or attaching the force applying portion 175a to the lid portion 110, e.g. by applying a torque to the further fastening element 185. The method may comprise applying the first component of the compressive force to the sealing element 105 before applying the second component of the compressive force to the sealing element.
[000124] The method disclosed herein is not limited to the sequence described above. It will be appreciated that in other embodiments, the steps described above may be performed in an alternative order.
[000125] It should be understood that the apparatus disclosed herein is not limited to being provided or suitable for forming a seal with an object that is fed through a wall of a vacuum chamber. For example, in other embodiments the apparatus may be provided or suitable for forming a seal of with an object that is fed through a wall of a chamber or enclosure. The chamber or enclosure may be suitable or provided for use in or with a lithographic apparatus. The wall may be arranged in the chamber or enclosure to separate different environments, atmospheres and/or substances. For example, a liquid or liquid substance may be provided on one side of the wall and a gas may be provided on another side of the wall. Alternatively, a fluid comprising a first pressure may be provided on one side of the wall and a fluid comprising a second pressure may be provided on another side of the wall. The first pressure may be different from the second pressure.
[000126] Alternatively or additionally, the wall may be arranged or provided to separate two or more chambers or enclosures from one another.
[000127] It should be understood that the chamber(s) or enclosure(s) described above may not be limited to being used in or with a lithographic apparatus. For example, the chamber(s) or enclosure/s) described above may find utility in food and/or chemical industries.
[000128] Alternatively or additionally, the chamber(s) or enclosure(s) may be provided in the form of cooling chamber(s) or enclosure(s).
[000129] It should be understood that the object(s) disclosed herein is not limited to being part of or comprised in a lithographic apparatus or one or more systems thereof. For example, the object(s) may find utility in food and/or chemical industries. The object(s) may be used or configured to transport a fluid, such as for example a cooling fluid, a purging fluid and/or a cleaning fluid. The fluid may be or comprise a gas, a liquid or a combination thereof.
[000130] Alternatively or additionally, the object may be used or configured to transmit or transport one or more signals. The one or more signals may comprise one or more electrical signals, one or more optical signals, one or more power signals or a combination thereof.
[Ü00131] Alternatively or additionally, the object may be used or configured to transport or transmit radiation, power, electricity or a combination thereof.
[Ö00132] It will be appreciated that one or more sealing element(s) may comprise any of the features described above in relation to each sealing element.
[000133] Although specific reference may be made in this text to embodiments of the invention in the context of a lithographic apparatus, embodiments of the invention may be used in other apparatus. Embodiments of the invention may form part of a mask inspection apparatus, a metrology apparatus, or any apparatus that measures or processes an object such as a wafer (or other substrate) or mask (or other patterning device). These apparatus may be generally referred to as lithographic tools. Such a lithographic tool may use vacuum conditions or ambient (non-vacuum) conditions.
[000134] The term “EUV radiation'' may be considered to encompass electromagnetic radiation having a wavelength within the range of 4-20 nm, for example within the range of 13-14 nm. EUV radiation may have a wavelength of less than 10 nm, for example within the range of 4-10 nm such as 6.7 nm or 6.8 nm.
[000135] Although Figure 1 depicts the radiation source SO as a laser produced plasma LPP source, any suitable source may be used to generate EUV radiation. For example, EUV emitting plasma may be produced by using an electrical discharge to convert fuel (e.g. tin) to a plasma state. A radiation source of this type may be referred to as a discharge produced plasma (DPP) source. The electrical discharge may be generated by a power supply which may form part of the radiation source or may be a separate entity that is connected via an electrical connection to the radiation source SO.
[000136] Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the lithographic apparatus described herein may have other applications. Possible other applications include the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, flat-panel displays, liquid-crystal displays (LCDs), thin-film magnetic heads, etc.
[000137] Although specific reference may have been made above to the use of embodiments of the invention in the context of optical lithography, it will be appreciated that the invention may be used in other applications, for example imprint lithography, and where the context allows, is not limited to optical lithography. In imprint lithography a topography in a patterning device defines the pattern created on a substrate. Tire topography of the patterning device may be pressed into a layer of resist supplied to the substrate whereupon the resist is cured by applying electromagnetic radiation, heat, pressure or a combination thereof. The patterning device is moved out of the resist leaving a pattern in it after the resist is cured.
[000138] While specific embodiments of the invention have been described above, it will be appreciated that the invention may be practiced otherwise than as described. The descriptions above are intended to be illustrative, not limiting. Thus it will be apparent to one skilled in the art that modifications may be made to the invention as described without departing from the scope of the clauses set out below. Other aspects of the invention are set out as in the following numbered clauses: 1. An apparatus for forming a seal with an object that is fed through a wall of a vacuum chamber, the apparatus comprising: a sealing element configured to engage with the object, the sealing element being formed from a resilient material; and an arrangement configured to apply a compressive force to the sealing element such that the apparatus forms the seal with the object. 2. The apparatus of clause 1, wherein the arrangement is configured to apply the compressive force to the sealing element such that the seal is formed between the object and the wall of the vacuum chamber. 3. The apparatus of clause 1 or 2, wherein the compressive force comprises a first component and a second component, the arrangement being configured to apply the first component of the compressive force to the sealing element in a first direction and the second component of the compressive force to the sealing element in a second direction. 4. The apparatus of clause 3 wherein the first direction is different to the second direction, the first direction being substantially orthogonal to the second direction. 5. The apparatus of any preceding clause wherein the sealing element comprises a bore for receiving the object within the bore. 6. The apparatus of clause 5, w'herein the sealing element comprises an opening, the opening defining or comprising a split section, w'hich extends between the bore and an outer surface of the sealing element. 7. The apparatus of any preceding clause, wherein the sealing element is configured to partially or completely enclose or surround the object. 8. The apparatus of any preceding clause w’herein the sealing element comprises an elastomeric material, such as a fluoroelastomer and/or synthetic rubber. 9. The apparatus of any preceding clause, wherein the arrangement comprises a lid portion, the lid portion comprising a recess configured to house or receive the sealing element. 10. The apparatus of clause 9, wherein the recess comprises or defines a surface that is configured for engaging with a complementary surface of the sealing element. 11. The apparatus of clause 10, wherein the surface of the recess is configured or shaped to match or correspond to the complementary surface of the sealing element such that at least a part of the compressive force applied by the arrangement is transferred to and/or distributed across at least a part of the sealing element. 12. The apparatus of any of clauses 9 to 11, wherein the arrangement comprises a further sealing element, the further seeding element being configured for arrangement between the lid portion and a further surface of a mounting member or the wall of the vacuum chamber. 13. The apparatus of clause 12, wherein the further sealing element is configured to fit into a recess formed in the further surface. 14. The apparatus of clause 12 or 13, wherein the further sealing element comprises a substantially planar protrusion. 15. The apparatus of clause 14, wherein at least one of: a shape, area, position and footprint of the planar protrusion substantially corresponds to at least one of: a shape, area, position and footprint of a substantially planar surface or portion of the sealing element. 16. The apparatus of any of clauses 12 to 16, wherein the arrangement comprises a fastening element or a plurality of fastening elements for detachably fastening the lid portion to the further surface. 17. The apparatus of any of clauses 12 to 16, wherein, when the lid portion is fastened or attached to the further surface, the lid portion is configured to apply the first component of the compressive force to the sealing element and/or to the further sealing element. 18. The apparatus of any of clauses 15 to 17, wherein, when the lid portion is fastened or attached to the further surface, the lid portion is configured to urge at least the planar surface or portion of the sealing element towards a respective planar protrusion of the further sealing element. 19. The apparatus of any one of clauses 9 to 18, wherein the arrangement comprises a force applying member configured to be detachably fastened to the lid portion. 20. The apparatus of clause 19, wherein when the force applying member is fastened to the lid portion, the force applying member is configured to apply the second component of the compressive force to the sealing element. 21. The apparatus of clause 20, wherein the arrangement comprises a further fastening element or a plurality of further fastening elements for fastening the force applying member to the lid portion. 22. The apparatus of any preceding clause, wherein the arrangement comprises a pair of compression elements, the sealing element being located or locatable between the pair of compression elements. 23. The apparatus of clause 22, wherein the compression elements of the pair of compression elements are contigured to balance and/or equalize the second component of the compressive force on or across the sealing element. 24. The apparatus of clause 12 or any clause dependent thereon, wherein the apparatus comprises the mounting member, the arrangement being configured for detachably fastening or attaching the apparatus to the mounting member. 25. The apparatus of clause 24, wherein the mounting member is configured for detachably fastening or attaching the apparatus to the wall of the vacuum chamber. 26. The apparatus of any one of clauses 1 to 24, wherein the apparatus is configured for being detachably fastened or attached to the wall of the vacuum chamber. 27. The apparatus of any preceding clause, wherein the seal formed with the object and/or between the object and wall of the vacuum chamber is a hermetic seal. 28. A sealing assembly comprising: an apparatus according to any one of clauses 1 to 27; and an object for feeding through a wall of a vacuum chamber. 29. The assembly of clause 28 wherein the object comprises at least one of: a fiber, a fiber hose, fiber bundle, pipe, tubing, cable or wire. 30. A lithographic apparatus comprising: an illumination system configured to condition a radiation beam; a support structure constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; and a projection system configured to project the patterned radiation beam onto the substrate, the support structure, illumination system, substrate table and/or projection system being arranged in one or more vacuum chambers; and an apparatus for forming a seal with an object that is fed through a wall of the one or more vacuum chamber according to any one of clauses 1 to 27. 31. A method for forming a seal with an object that is fed through a wall of a vacuum chamber, the method comprising: engaging a sealing element with the object, the sealing element being formed from a resilient material; and applying a compressive force to the sealing element such that a seal is formed with the object. 32. The method according to clause 31, wherein the method comprises feeding or passing the object through the wall of the vacuum chamber piior to engaging the object with the sealing element. 33. The method of clause 31 or 32, wherein the compressive force comprises a first component and a second component, the method comprising applying the first component of the compressive force to the sealing element in a first direction. 34. The method of clause 33, wherein the method comprises applying the second component of the compressive force to the sealing element in a second direction. 35. The method of clause 34, wherein the first direction is different to the second direction, the first direction being substantially orthogonal to the second direction.

权利要求:
Claims (1)
[1]
A lithography device comprising: an illumination device adapted to provide a radiation beam; a carrier constructed to support a patterning device, the patterning device being able to apply a pattern in a section of the radiation beam to form a patterned radiation beam; a substrate table constructed to support a substrate; and a projection device adapted to project the patterned radiation beam onto a target area of the substrate, characterized in that the substrate table is adapted to position the target area of the substrate in a focal plane of the projection device.

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同族专利:

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引用文献:

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法律状态:

优先权:

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申请号 | 申请日 | 专利标题

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EP17194565|2017-10-03|

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